发明名称 Method for manufacturing semiconductor device with SEG film active region
摘要 A semiconductor device and a method for manufacturing the same are provided. A barrier film is formed in a device separating structure, and the device separating structure is etched at a predetermined thickness to expose a semiconductor substrate. Then, a SEG film is grown to form an active region whose area is increased. As a result, a current driving power of a transistor located at a cell region and peripheral circuit regions is improved.
申请公布号 US8236665(B2) 申请公布日期 2012.08.07
申请号 US20100758720 申请日期 2010.04.12
申请人 KIM YOUNG BOG;HYNIX SEMICONDUCTOR INC. 发明人 KIM YOUNG BOG
分类号 H01L21/76;H01L21/20;H01L21/36 主分类号 H01L21/76
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