发明名称 LARGE AREA LINEAR ARRAY NANOIMPRINTING
摘要 <p>Systems and methods for imprinting and aligning an imprint lithography template with a field on a substrate are described. The field of the substrate may include an elongated side, and alignment sensitivity on the elongated side may be intentionally minimized.</p>
申请公布号 KR20120086702(A) 申请公布日期 2012.08.03
申请号 KR20127010387 申请日期 2010.10.08
申请人 MOLECULAR IMPRINTS, INC. 发明人 CHOI BYUNG JIN;SREENIVASAN SIDLGATA V.;CHERALA ANSHUMAN
分类号 G03F7/00;H01L21/027 主分类号 G03F7/00
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