The invention relates to an edge bead remover composition for an organic film disposed on a substrate surface, comprising an organic solvent and at least one polymer having a contact angle with water greater than 70°. The invention also relates to a process for using the composition as an edge bead remover for an organic film.
申请公布号
WO2012056311(A3)
申请公布日期
2012.08.02
申请号
WO2011IB02588
申请日期
2011.10.27
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
NEISSER, MARK, O.;CHAKRAPANI, SRINIVASAN;PADMANABAN, MUNIRATHNA;DAMMEL, RALPH, R.
