| 摘要 |
<P>PROBLEM TO BE SOLVED: To drive a movable body in a desired direction highly accurately without being affected by measurement delay associated with propagation of a detection signal from an encoder head in a propagation path. <P>SOLUTION: In driving a stage in a prescribed direction within a movement plane, measurement data (y=y(t)) corresponding to a detection signal from at least one head of an encoder system, which measures the positional information of the stage within the movement plane, is captured at a predetermined control sampling interval, approximation curve (y=y<SB POS="POST">cal</SB>(t)) for correcting a measurement error is obtained based on a plurality of data items including up-to-date measurement data captured at last and past measurement data including at least preceding (preceding by 1 control sampling interval (Δt)) data and information of delay time (δ) associated with propagation of a detection signal in a propagation path, and the stage is driven such that a measurement error (y<SB POS="POST">cal</SB>(t)-y(t)) of the head caused by measurement delay associated by propagation of the detection signal is corrected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
