SOURCE SUPPLYING APPARATUS AND FILM FORMING APPARATUS

摘要

There is provided a source supplying apparatus 62 including: a vertically elongated source containing body 64 having an outer peripheral surface formed as a liquid source flow surface 90 for a liquid source to flow thereon; a liquid source storage member 66 provided at a position of the source containing body in a height direction to store the liquid source, and configured for the liquid source to flow to the liquid source flow surface by wettability; and a heating device 68 provided within the source containing body, and configured to heat the liquid source storage member to allow the liquid source to have wettability and to heat a leading end of the source containing body to an evaporating temperature of the liquid source.