| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser machining method capable of easily performing laser machining with high productive efficiency by effectively reducing contamination due to decomposed matters on a surface of an object to be machined when machining the object to be machined by a laser beam. <P>SOLUTION: The laser machining method, in which the laser beam is irradiated to the object to be machined to carry out machining, includes performing the laser machining while sucking and removing, near the irradiated part, the decomposed matters generated upon irradiating the laser beam. <P>COPYRIGHT: (C)2012,JPO&INPIT |
