| 摘要 |
<P>PROBLEM TO BE SOLVED: To verify accuracy of overlapping. <P>SOLUTION: An overlapping device includes: a first stage which holds one of a plurality of substrates; a second stage which is disposed facing the first stage, is relatively movable to the first stage, and holds the others of the plurality of substrates; and an observation part which observes alignment marks of the one and the other substrates in the case of positioning the one and the other substrates in the state that the first stage and the second stage hold the plurality of substrates, and observes the alignment marks in the state that the plurality of overlapped substrates are separated from the first stage and are held by the second stage. <P>COPYRIGHT: (C)2012,JPO&INPIT |
