发明名称 NANOSTRUCTURED SEMICONDUCTOR MATERIALS, METHOD FOR THE MANUFACTURE THEREOF AND CURRENT PULSE GENERATOR FOR CARRYING OUT SAID METHOD
摘要 The present invention relates to a method for electrochemical treatments of a semiconductor material and the electrical pulse generator for said method used in the production of three-dimensional structures integrated in a wafer of semiconductor material or free standing nanostructured particles, characterized in that it comprises at least one step for the anodic formation of one or multiple porous layers etched in a semiconductor by means of applying electric current pulses with modulation of its intensity in time, a step of lifting the layers from the substrate by ultrasounds or mechanically and, optionally, a step of mechanical grinding.
申请公布号 WO2012065825(A3) 申请公布日期 2012.08.02
申请号 WO2011EP68940 申请日期 2011.10.28
申请人 EM-SILICON NANO-TECHNOLOGIES, S.L.;MATVEYEVA, YAUHENYIA;MAKUSHOK, YURI;PASTOR GALIANO, ESTER, LORENA 发明人 MATVEYEVA, YAUHENYIA;MAKUSHOK, YURI;PASTOR GALIANO, ESTER, LORENA
分类号 C25D11/32;H03K3/53 主分类号 C25D11/32
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