发明名称 PHOTOSENSITIVE POLYIMIDE PRECURSOR AND PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive polyimide precursor having a small coefficient of thermal expansion and residual stress, excellent adhesiveness to a copper substrate or the like, and high fracture strength of a resin produced from the precursor, and to provide a photosensitive resin composition. <P>SOLUTION: The photosensitive polyimide precursor has a repeating unit (1) obtained by polymerization condensation of a tetracarboxylic acid and an aromatic diamine and has an actinic ray-functional group at both terminals. The photosensitive polyimide precursor contains an aromatic tetracarboxylic acid having a rigid structure by 70 to 100 mol% with respect to the whole molar number of the tetracarboxylic acid. The aromatic diamine contains a thiophene-containing aromatic diamine and an aromatic diamine with a rigid structure by a molar ratio of 3:97 to 30:70. The actinic ray functional group comprises a phenyl amino group having a carbon-carbon double bond or a dicarboxyphenylcarbonyl group having a carbon-carbon double bond as an ester. The photosensitive resin composition contains the above precursor. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012141447(A) 申请公布日期 2012.07.26
申请号 JP20100294036 申请日期 2010.12.28
申请人 NIPPON ZEON CO LTD 发明人 TANAKA AKIRA
分类号 G03F7/027;C08G73/10;G03F7/004;H01L21/027;H01L23/14 主分类号 G03F7/027
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