发明名称 PREDICTIVE MAINTENANCE FOR THIRD PARTY SUPPORT EQUIPMENT
摘要 A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
申请公布号 US2012191225(A1) 申请公布日期 2012.07.26
申请号 US201113306646 申请日期 2011.11.29
申请人 SWYERS JOHN R.;YEDATORE MANJUNATH;DAVIS TONY L.;TURNER DONN;JOHNSON MICHAEL W. 发明人 SWYERS JOHN R.;YEDATORE MANJUNATH;DAVIS TONY L.;TURNER DONN;JOHNSON MICHAEL W.
分类号 G05B13/02 主分类号 G05B13/02
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