| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an economically advantageous polished object holding material shortened in a dressing time for the polished object holding material, suppressed in scratch to the polished object, and improved in warp precision in a thin substrate, substrate thickness precision, and lifetime. <P>SOLUTION: The polished object holding material is formed by joining one layer of a liquid crystal polymer film to both sides including a base layer of a plate-like material 4 of one of a metal plate, a fiber-reinforced plastic plate, and a plastic plate via a thermosetting adhesive, or the polished is formed by stacking one layer of a liquid crystal polymer film on both sides of a glass long fiber base material 2 (prepreg) in which a plurality of thermosetting resins is impregnated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
