摘要 |
<P>PROBLEM TO BE SOLVED: To further improve the light-receiving sensitivity and the shading of a solid-state imaging device having light-receiving sections that are mutually used by a plurality of pixels and are adjacent to each other. <P>SOLUTION: Light pipes 10 that constitute optical waveguides and have a cross section of a parallelogram shape are formed in an interlayer insulating film 9 between microlenses 14 and light-receiving sections 3. The lower end surface of each light pipe 10 opens above each light-receiving section 3 so as to include the center portion of the light-receiving section 3 in a plan view, while the upper end surface of each light pipe 10 opens under each microlens 14 so as to include the center portion of the microlens 14 in a plan view. The regions of the upper end surface and the lower end surface do not align with each other and are different from each other in a plan view. <P>COPYRIGHT: (C)2012,JPO&INPIT |