| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck comprising a ceramic body which do not cause ceramic breakage upon the application of RF bias to the chuck and heating of the electrodes. <P>SOLUTION: An apparatus which includes a laminated ceramic body with multilayer electrodes and a method of fabricating this apparatus are disclosed. The laminated ceramic body comprises layers of ceramic material, with portions of certain layers being silk screened with an intermediate layer of electrically conductive material. Subsequent sintering results in the formation of a solid ceramic body with multilayer electrodes made up of the electrically conductive material layers. The apparatus further comprises an electrical connector extending partially into the ceramic body and intersecting at least one of these electrodes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
