发明名称 NITRIDE SUBSTRATES, THIN FILMS, HETEROSTRUCTURES AND DEVICES FOR ENHANCED PERFORMANCE, AND METHODS OF MAKING THE SAME
摘要 The present invention provides nitride semiconductors having a moderate density of basal plane stacking faults and a reduced density of threading dislocations, various products based on, incorporating or comprising the nitride semiconductors, including without limitation substrates, template films, templates, heterostructures with or without integrated substrates, and devices, and methods for fabrication of templates and substrates comprising the nitride semiconductors.
申请公布号 US2012187454(A1) 申请公布日期 2012.07.26
申请号 US201113190243 申请日期 2011.07.25
申请人 HASKELL BENJAMIN;FINI PAUL T.;INLUSTRA TECHNOLOGIES, LLC 发明人 HASKELL BENJAMIN;FINI PAUL T.
分类号 H01L29/205;H01L29/20 主分类号 H01L29/205
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