发明名称 SOLUTIONS AND METHODS FOR METAL DEPOSITION
摘要 One aspect of the present invention is a deposition solution to deposit metals and metal alloys such as for fabrication of electronic devices. According to one embodiment, the deposition solution comprises metal ions and a pH adjustor. The pH adjustor comprises a functional group having a general formula (R1R2N)(R3R4N)C=N- R5 where: N is nitrogen; C is carbon; and R-1, R2, R3, R4, and R5 are the same or different and represent hydrogen, alkyl group, aryl group, or alkylaryl group. Another aspect of the presented invention is a method of preparing deposition solutions. Still another aspect of the present invention is a method of fabricating electronic devices.
申请公布号 WO2012056390(A3) 申请公布日期 2012.07.26
申请号 WO2011IB54740 申请日期 2011.10.24
申请人 LAM RESEARCH CORPORATION;LAM RESEARCH AG;KOLICS, ARTUR 发明人 KOLICS, ARTUR
分类号 C23C18/16 主分类号 C23C18/16
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