首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Verfahren zum Ätzen von Mehrschicht-Photolack mit geringer Unterätzeigenschaft und keiner Veränderung des Photolacks während des Ätzens
摘要
申请公布号
DE69126455(T2)
申请公布日期
1997.12.18
申请号
DE19916026455T
申请日期
1991.02.21
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
LEVY, KARL B., LOS ALTOS, CALIFORNIA 94024, US
分类号
G03F7/11;G03F7/09;G03F7/095;G03F7/26;G03F7/40;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/32
主分类号
G03F7/11
代理机构
代理人
主权项
地址
您可能感兴趣的专利
METHOD FOR SCREENING COMPOUND LIBRARIES
ACTIVE CONTROL OF TONE NOISE IN ENGINE DUCTS
OCEAN THERMAL ENERGY CONVERSION (OTEC) SYSTEM
MIXTURE AND PACKAGING OF GRAPE DERIVATIVES, CARBON DIOXIDE AND WATER
4-AZASTEROIDS WITH SIDE-CHAIN FLUOROKETONES
A PROCESS FOR THE MANUFACTURE OF SYNTHESIS GAS BY PARTIAL OXIDATION OF A GASEOUS HYDROCARBON-CONTAINING FUEL USING A MULTI-ORIFICE (CO-ANNULAR) BURNER
WEB CONTROL
CONICAL DRUM STORAGE CONTAINER
HIGH STRENGTH, HIGH SAFETY SUBMERSIBLE VESSEL
LOADING PLATFORM
METHOD OF MANUFACTURING PART HAVING UNDERCUT
METHOD FOR THE REMOVAL OF NON-METAL AND METALLOID HYDRIDES
ENGINE COOLING SYSTEM
OXIDASE-PROMOTED GELLING OF PHENOLIC POLYMERS
FOULING PROTECTION FOR CONSTRUCTIONS IN WATER
SEAT ANCHORAGE ARRANGEMENTS
METHOD OF PROTECTING A LIVING ORGANISM USING ENERGY AND A DEVICE FOR CARRYING OUT SAID METHOD
METHOD OF STERILIZING A PREFILLED SYRINGE AND A PREFILLED SYRINGE STERILIZED BY THE SAME
RINSING DEVICE FOR REVOLVING MILKING INSTALLATIONS
Isobutylenpolymer mit ungesättigter Gruppe und seine Herstellung.