发明名称 Processing method of row bar for manufacturing slider and bar mask for row bar processing
摘要 A method of row bar for manufacturing slider includes steps: providing a plurality of row bars arranged in rows, with each row bar having slider regions and bar grooves adjacent to the slider region; providing photoresist on the row bar; providing a bar mask, having slider cover and groove cover which is transparent, the slider cover having two extending portions and a ABS portion arranged therebetween with some transparent patterns formed thereon; arranging the ABS portion on the slider region of the third said row bar, with two extending portion being covered respectively on the slider region of the second row bar and the fourth row bar, then exposing the bar mask to the light, the bar groove being exposed to the light via the groove cover; carrying out the above step until the ABS portions are arranged on the last row bar; developing and etching the row bars.
申请公布号 US2012187080(A1) 申请公布日期 2012.07.26
申请号 US201113064693 申请日期 2011.04.08
申请人 MA BING;SHEN WEIRONG;MO CHUANYU;SAE MAGNETICS (H.K.) LTD. 发明人 MA BING;SHEN WEIRONG;MO CHUANYU
分类号 G03F1/00;G11B5/10 主分类号 G03F1/00
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