| 摘要 |
PURPOSE: A rotary type vacuum table is provided to simultaneously rotate a table and fix a wafer to a table with a vacuum by connecting a vacuum unit causing a vacuum and a table where a wafer is loaded to a rotary joint. CONSTITUTION: A table(100) includes a vacuum line to fix a loaded wafer(10). A rotary joint(200) is connected to a vacuum line of the table. A spindle shaft(300) is installed to a lower part of the table to be attachable. A rotation unit(400) rotates a spindle shaft by being connected to the spindle shaft. A vacuum unit(500) fixes the wafer to a table.
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