APPARATUS FOR SURFACE TEXTURING OF WAFER FOR SOLAR CELL WITH IMPROVING ETCHING UNIFORMITY

摘要

PURPOSE: Apparatus for surface texturing of a wafer for solar cells with creasing etching uniformity is provided to increase light absorption efficiency of a solar cell by forming an identical pyramid structure across the wafer surface. CONSTITUTION: A wafer(101) is loaded on a susceptor(112) located on inside of a chamber(110). A main gas dispenser(120) sprays etching gases from the upper to the lower inside the chamber. A side gas dispenser(130) located on the side of the chamber sprays etching gases into the chamber. An etching gas provider(140) including an etching gas storage unit(142) containing etching gases supplies etching gases to the main and side gas dispensers.