发明名称 |
PROCESS FOR THE MANUFACTURE OF WAFERS FOR SOLAR CELLS AT AMBIENT PRESSURE |
摘要 |
<p>Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N-type doping. The wafers can be treated by etching them, in a plasma assisted process, with an etching gas containing or consisting of carbonyl fluoride. Hereby, the surface is roughened so that the degree of light reflection is reduced, or glass-like phosphorus-containing oxide coatings caused by phosphorus doping are removed. Carbonyl fluoride is also very suitable to selectively etch silicon oxide in silicon oxide/silicon composites.</p> |
申请公布号 |
EP2478570(A2) |
申请公布日期 |
2012.07.25 |
申请号 |
EP20100754502 |
申请日期 |
2010.09.15 |
申请人 |
SOLVAY FLUOR GMBH |
发明人 |
RIVA, MARCELLO;LOPEZ ALONSO, ELENA;LINASCHKE, DORIT;DANI, INES;KASKEL, STEFAN |
分类号 |
H01L31/18;H01L21/3065 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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