发明名称 |
SILICON PURIFICATION METHOD AND SILICON PURIFICATION APPARATUS |
摘要 |
<p>The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20° to 80°.</p> |
申请公布号 |
EP2479144(A1) |
申请公布日期 |
2012.07.25 |
申请号 |
EP20100817285 |
申请日期 |
2010.09.17 |
申请人 |
ULVAC, INC. |
发明人 |
OOKUBO ,YASUO;NAGATA, HIROSHI |
分类号 |
C01B33/037;H05H1/44 |
主分类号 |
C01B33/037 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|