发明名称 SILICON PURIFICATION METHOD AND SILICON PURIFICATION APPARATUS
摘要 <p>The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20° to 80°.</p>
申请公布号 EP2479144(A1) 申请公布日期 2012.07.25
申请号 EP20100817285 申请日期 2010.09.17
申请人 ULVAC, INC. 发明人 OOKUBO ,YASUO;NAGATA, HIROSHI
分类号 C01B33/037;H05H1/44 主分类号 C01B33/037
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