Tuning fork-type vibrator, tuning fork-type vibrator manufacturing method, and angular velocity sensor

摘要

A tuning fork-type piezoelectric vibrator includes a substantially rectangular plate-shaped base to be supported by a circuit substrate and two pillar-shaped legs. The base includes a substantially rectangular plate-shaped junction arranged to be connected to the circuit substrate, and a body disposed between the junction and the two legs. In order for the difference between the resonant frequency in the drive mode of the tuning fork-type piezoelectric vibrator and the resonant frequency in in-plane, in-phase mode thereof to be at least about 1 kHz, the base and two legs are configured so that the product of the length of the body divided by the substantial width of the body minus the width of the legs and the resonant frequency in drive mode is at least about 60×103.