| 摘要 |
PURPOSE: Gas supply assembly and a substrate processing apparatus including the same are provided to prevent the substrate processing apparatus to be contaminated by preventing the leakage of gas in the gas supply line. CONSTITUTION: A gas supply unit is installed at the upper side of a processing space. A gas supply pipe(191) is connected with a gas supply device and supplies gas to the gas supply unit. A gas supply pipe unit(190) comprises an exhaust pipe exhausting the gas leaked from the gas supply pipe. The gas supply pipe unit is divided into a first gas supply pipe unit and a second gas supply pipe unit. The first gas supply pipe unit and the second gas supply pipe unit are detachably connected with each other through gas supply assembly. |
