发明名称 ELECTROPLATING HEAD AND METHOD FOR OPERATING THE SAME
摘要 An electroplating head including a chamber having a fluid entrance and a fluid exit is provided. The chamber is configured to contain a flow of electroplating solution from the fluid entrance to the fluid exit. The electroplating head also includes an anode disposed within the chamber. The anode is configured to be electrically connected to a power supply. The electroplating head further includes a porous resistive material disposed at the fluid exit such that the flow of electroplating solution is required to traverse through the porous resistive material.
申请公布号 KR101167539(B1) 申请公布日期 2012.07.20
申请号 KR20050056630 申请日期 2005.06.28
申请人 发明人
分类号 C25D17/10;C25D17/00;C25D17/14 主分类号 C25D17/10
代理机构 代理人
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