| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which can increase linear motor efficiency by decreasing a distance between a stator surface and a permanent magnet surface. <P>SOLUTION: A vacuum partition wall 55 is disposed between a permanent magnet 52 and a driving magnet 50 to isolate space in which the permanent magnet 52 is disposed in a vacuum atmosphere, and space in which the driving magnet 50 is disposed in an air pressure atmosphere. The vacuum partition wall 55 has an upper plate part 59a with a flat surface on the permanent magnet 52 side, a second side wall part 59c connected airtightly with the edge of the upper plate part 59a, and a plurality of ribs 61. The plurality of ribs 61 are bridged between portions of the respective second side wall parts 59c facing each other and formed integrally on the air pressure atmosphere side of the upper plate part 59a for inhibiting deflection of the upper plate part 59a. As a result, the maximum deflection amount of the vacuum partition wall 55 can be decreased and a distance between the permanent magnet 52 and the driving magnet 50 can be decreased. <P>COPYRIGHT: (C)2012,JPO&INPIT |
