REACTIVE HEAT TREATMENT PROCESS INCLUDING THE ENRICHMENT OF A THIN-FILM MATERIAL WITH A GROUP VI ELEMENT

摘要

The invention relates to a heat treatment process including the enrichment of a thin-film material (1) with a group VI element, said process including one or more enrichment steps during which the material (1) is placed in contact with a reactive gas (5a) including the group VI element at a controlled partial pressure, said process being characterized in that, for each enrichment step, the material (1) is placed in a reactor (3, 4, 5, 6, 7) into which the reactive gas of the enrichment step is fed, the reactive gas being obtained by bubbling a carrier gas (16b) in a feedstock (16a) which includes the group VI element and which is placed into a container (16), and by maintaining temperature and pressure conditions in the container that are selected such that the reactive gas (5a) includes the group VI element in a predetermined mass fraction (Xs) for the enrichment step.