发明名称 |
SILICA GLASS CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silica glass crucible for pulling a silicon single crystal, capable of suppressing the occurrence of brown mold and the occurrence of air pockets in the silicon single crystal and improving pulling yield of the silicon single crystal. <P>SOLUTION: The silica glass crucible having a straight cylinder section and a bottom section comprises: an innermost layer that comprises a borosilicate glass and has a thickness of 0.05-0.5 mm; an inner layer that comprises a transparent silica glass and has an area in contact with the innermost layer wherein the OH group concentration is less than 30 ppm and the thickness is 3-5 mm; and an outer layer comprising an opaque silica glass. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012136398(A) |
申请公布日期 |
2012.07.19 |
申请号 |
JP20100290379 |
申请日期 |
2010.12.27 |
申请人 |
COVALENT MATERIALS CORP |
发明人 |
ICHINOKURA MASATO;MINAMI TOSHIRO;FUKAZAWA YUJI;SUGANO AKIRA |
分类号 |
C30B29/06;C03B20/00;C30B15/10 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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