发明名称 |
INTEGRATED CIRCUIT DEVICE HAVING A RESISTOR AND METHOD OF MANUFACTURING THE SAME |
摘要 |
<p>PURPOSE: An integrated circuit device including a resistive device and a manufacturing method thereof are provided to stably maintain the resistance of a resistive pattern by sufficiently decreasing a contact resistance of a contact unit in contact with a resistive connector. CONSTITUTION: A semiconductor substrate(101) including an active region is provided. A resistive pattern including at least one connection unit is formed. The resistive pattern is arranged on a protrusion unit which limits a resistive body and a recess unit. A gate pattern(180) including a metal silicide layer is formed. A resistive connector is electrically connected to the connection unit.</p> |
申请公布号 |
KR20120081288(A) |
申请公布日期 |
2012.07.19 |
申请号 |
KR20110002546 |
申请日期 |
2011.01.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, YOUNG HO;KIM, KEON SOO;CHO, SEONG SOON;SHIN, JIN HYUN |
分类号 |
H01L27/02;H01L21/336;H01L29/78 |
主分类号 |
H01L27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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