发明名称 Resin composition, embedding material, insulating layer and semiconductor device
摘要 <p>The application concerns a semiconductor device (500) comprising: a semiconductor substrate (10) having at least a through-hole (1) extending through the semiconductor substrate (10) in a thickness direction thereof, an inner surface defining the through-hole (1) and one surface (102) on which the through-hole (1) is opened; an insulating layer including a first resin layer (31) formed so as to cover the inner surface defining the through-hole (1) and the one surface (102) of the semiconductor substrate (10), and a second resin layer (32) applied to the first resin layer (31); and a conductive portion (6) provided in the through-hole (1) so as to pass through the first resin layer (31) and the second resin layer (32), wherein an elastic modulus of the first resin layer (31) is lower than that of the second resin layer.</p>
申请公布号 EP2477215(A2) 申请公布日期 2012.07.18
申请号 EP20120002114 申请日期 2008.06.11
申请人 SUMITOMO BAKELITE COMPANY LIMITED 发明人 TAKAHASHI, TOYOSEI;TAKAYAMA, RIE;DEJIMA, HIRIHISA;KUSUNOKI, JUNYA
分类号 H01L21/768;C08L63/10;H01L23/48 主分类号 H01L21/768
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