发明名称
摘要 <p>An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.</p>
申请公布号 JP4981472(B2) 申请公布日期 2012.07.18
申请号 JP20070033496 申请日期 2007.02.14
申请人 发明人
分类号 G01N3/08;G01N3/06 主分类号 G01N3/08
代理机构 代理人
主权项
地址