| 摘要 |
To realize miniaturization/high integration and increase in the amount of accumulated charges, and to give a memory structure having a high reliability. A 1 transistor 1 capacitor (1T1C) structure having 1 ferroelectric capacitor structure and 1 selection transistor every memory cell is adopted, and respective capacitor structures are disposed respectively in either one layer of interlayer insulating films of 2 layers having different heights from the surface of a semiconductor substrate. |
