Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element

摘要

A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.