TRANSFERRING TOOL FOR DEVICE

摘要

PURPOSE: A device transferring tool is provided to steadily and rapidly transfer a device by minimizing the whole weight and to simplify composition of a picker by including a check valve closing a pneumatic passage when vacuum pressure is not formed at the upper end of an absorbing head. CONSTITUTION: A picker(850) adsorbs a device at the withdrawal position and attaches and detaches the device at the loading position. A support block(820) supports the picker. One or more X-guide rails(811) guide the support block in an X-direction. One or more Z-guide rails(812) guide the support block in a Z-direction. A rotary arm(830) moves the picker combined with the supporting block to the withdrawal position and the loading position. A check block forms vacuum pressure in an absorbing head by opening a pneumatic passage. The check block is formed at the upper end of the pneumatic passage.