发明名称 DRY VACUUM PUMP WITH PURGE GAS SYSTEM AND METHOD OF PURGING
摘要 The present invention provides a positive displacement dry pump comprising: a plurality of vacuum pumping stages comprising a respective plurality of pumping mechanisms driven by one or more drive shafts for pumping fluid in series through the pumping stages from a pump inlet at the high vacuum stage to a pump outlet at the low vacuum stage; a lubrication chamber housing a bearing assembly for supporting the drive shaft for rotational movement, the drive shaft extending from the high vacuum stage to the lubrication chamber through an opening of a head plate of the lubrication chamber; an inter-stage purge port through which gas can enter the pump at an inter-stage location downstream of the high vacuum stage and pass only through the or each vacuum pumping stage downstream of the inter-stage port; a lubrication chamber purge port located in the lubrication chamber through which purge gas can flow from a source of purge gas; wherein the inter-stage port is connected to the lubrication chamber for controlling the pressure of purge gas in the lubrication chamber thereby resisting the passage of pumped gases from the high vacuum chamber to the lubrication chamber through the opening of the head plate during use.
申请公布号 WO2011077105(A3) 申请公布日期 2012.07.12
申请号 WO2010GB51946 申请日期 2010.11.23
申请人 EDWARDS LIMITED;STEPHENS, PHILIP JOHN;STONES, IAN DAVID;GRAY, MALCOLM WILLIAM;NELLER, PAUL DAVID 发明人 STEPHENS, PHILIP JOHN;STONES, IAN DAVID;GRAY, MALCOLM WILLIAM;NELLER, PAUL DAVID
分类号 F04C29/00 主分类号 F04C29/00
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