| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus which eliminate unsteadiness of laser output, in a method and apparatus for achieving surface scribing of a workpiece of glass or the like by irradiating the surface of the workpiece with a laser beam under scanning. <P>SOLUTION: When the surface of a workpiece 1 of glass or the like is heated by irradiating the surface with a laser beam under scanning and the rear is cooled under scanning to thereby achieve surface scribing 4 of the workpiece 1, a liquid or impurities present on the surface of the workpiece 1 is blown off by a jetted gas from a blast nozzle installed just in front of the laser beam and the surface of the workpiece 1 is cleaned, so that CO<SB POS="POST">2</SB>laser beam absorption by the liquid such as a coolant or impurities present in the laser beam irradiation position of the workpiece 1 surface is prevented, and thus, reduction of required laser output and process stabilization are achieved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
