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发明名称
REMOVAL OF ORGANIC AGENT
摘要
申请公布号
JPS52113164(A)
申请公布日期
1977.09.22
申请号
JP19760029240
申请日期
1976.03.19
申请人
HITACHI LTD
发明人
HIROBE YOSHIMICHI;IWAMATSU SEIICHI
分类号
H01L21/205;H01L21/302;H01L21/3065
主分类号
H01L21/205
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