FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD OF FLOW RATE CONTROLLER FOR GAS FEEDER

摘要

The present invention makes it possible to perform flow rate measurement by means of a flow rate controller for a gas feeder more quickly and precisely, and makes it possible for a flow rate measurement device used for said measurement to have a simple structure and a small size. The flow rate measurement device comprises: a branch pipe line (Lb) which detachably links an inlet-side end section thereof as a branch to the section upstream of an open-close valve (Vo) disposed in an outlet end section of a gas supply pipe line (L), and which also links an outlet-side end section thereof to a gas discharge side; an open-close valve (V) which is disposed at the outlet side of the branch pipe line (Lb); a pressure detector (Pd) and a temperature detector (Td) for detecting gas pressure and gas temperature at the upstream side of the open-close valve (V); and a calculation control unit (CP) which receives detection signals from the pressure detector (Pd) and the temperature detector (Td) and calculates the flow rate of gas passing through the branch pipe line (Lb). The flow rate measurement device is detachably linked as a branch to the section upstream of the open-close valve (Vo) disposed at the outlet end section of the gas supply pipe line (L) of a gas feeder (GF).