| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a separation distance between respective movable arms to extend more when measurement by a four-terminal pair method is performed with an X-Y type circuit board inspection device. <P>SOLUTION: In order to perform measurement by means of a four-terminal pair method, coaxial cables C1-C4 are used for electric wiring to a measurement part 20 of electric current probes P1, P2 and electric voltage probes P3, P4. A first electric current probe P1 and a first electric voltage probe P3 are mounted on one movable arm 32 side with a lead wire 5 being electrically connected between external conductors S of respective coaxial cables C1, C3 thereof, and a second electric current probe P2 and a second electric voltage probe P4 are mounted on the other movable arm 31 side with the lead wire 5 being electrically connected between external conductors S of respective coaxial cables C2, C4 thereof. An external conductor S of the coaxial cable C3 and an external conductor S of the coaxial cable C4 are electrically connected each other through a metal coil spring 5a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
