发明名称 Apparatus and method for coating substrate
摘要 <p>The invention relates to an apparatus (1) and a method for producing a liquid film from one or more liquid precursors onto the surface (4) of a substrate (3) in order to establish a coating, the apparatus being arranged to direct an aerosol flow (13) against the surface (4) of the substrate (3) in a coating chamber (21). According to the invention, the apparatus comprises a homogenizing nozzle (17) for making the aerosol flow (13) homogeneous substantially in the direction of the surface (4) of the substrate (3) prior to passing the flow into the coating chamber (21).</p>
申请公布号 AU2010338150(A1) 申请公布日期 2012.07.12
申请号 AU20100338150 申请日期 2010.12.29
申请人 BENEQ OY 发明人 ASIKKALA, KAI
分类号 B05B1/04;B05B13/02;B05B15/12 主分类号 B05B1/04
代理机构 代理人
主权项
地址