| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate control of collapse when thinning for a transmission electron microscope specimen. <P>SOLUTION: The transmission electronic microscope specimen includes; a specimen body 4a; a thin film part 11; and a protection film 8. The thin film part 11 extends from the specimen body 4a in a first direction and is thinner than the specimen body 4a. The protection film 8 is continuously provided on the upper side surfaces of the specimen body 4a and the thin film part 11, and is harder than the main materials of the specimen body 4a and the thin film part 11. The thin film part 11 has an extremely thin film portion 12 coming into contact with the lower side of the protection film 8, and a residual portion 11a coming into contact with the lower side of the extremely thin film portion 12. The extremely thin film portion 12 is thinner than the residual portion 11a. The extremely thin film portion 12 has a triangular or square thin piece shape, with the part in contact with the protection film 8 defined as a first side. The extremely thin film portion 12 has an angle that is formed between a second side crossing with the first side and exposed to the outside and a third side crossing with the second side and connected to the residual portion 11a, of not less than 0° and not more than 180°. <P>COPYRIGHT: (C)2012,JPO&INPIT |
