发明名称 SEMICONDUCTOR DEVICE
摘要 In one embodiment, there is provided a semiconductor device that includes: a substrate; a dielectric layer on the substrate; a first ground metal layer embedded in the dielectric layer and having a first DC potential, the first ground metal layer having a first hole therethrough; a first ground patch disposed in the first hole; a second ground metal layer embedded in the dielectric layer such that the dielectric layer is interposed between the first and second ground metal layers in a thickness direction of the dielectric layer, the second ground metal layer having a second DC potential and having a second hole therethrough; a second ground patch disposed in the second hole; a first via which electrically connects the first ground metal layer and the second ground patch; and a second via which electrically connects the second ground metal layer and the first ground patch.
申请公布号 US2012175785(A1) 申请公布日期 2012.07.12
申请号 US201213424625 申请日期 2012.03.20
申请人 ONO NAOKO;KABUSHIKI KAISHA TOSHIBA 发明人 ONO NAOKO
分类号 H01L23/48 主分类号 H01L23/48
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