| 摘要 |
PURPOSE: A gas blowing nozzle for an apparatus for manufacturing poly-crystalline silicon ingot is provided to prevent the quality of a silicon ingot from decreasing by supplying an inactive gas through a plurality of first nozzle balls formed into a vertical direction and a plurality of second nozzle balls formed into a horizontal direction. CONSTITUTION: A supply tube(110) includes a gas supply line inside and is arranged to be penetrated to a chamber. A branch sphere(120) comprises a capped main body, a first nozzle ball, and a second nozzle ball. An upper portion of the capped main body is opened in order to be combined with a bottom portion of the supply tube. The first nozzle ball emits a gas in a vertical direction while being formed to be penetrated to a bottom portion of the capped main body in the vertical direction. The second nozzle ball emits the gas in a horizontal direction while being formed to be penetrated to a lateral portion of the capped main body in the horizontal direction. |
