METHOD FOR FAULT DIAGNOSIS OF A MEASURING INSTRUMENT

摘要

PURPOSE: A method for deciding the malfunction of a measuring device is provided to always monitor the existence of the malfunction of a measuring device and to manage products to maintain a quality over a predetermined level by using reliable measurement data of the measuring device. CONSTITUTION: A method for deciding the malfunction of a measuring device is as follows. New measurement data of a measuring device with respect to a current measurement object is collected. Past measurement data with respect to a past measurement object which is the same kind and has the similar goal specification with the current measurement object is extracted from measurement history data of the measuring device. The similarity between the collected new measurement data and extracted past measurement data is evaluated by comparing patterns.