LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, AND DEVICE FABRICATING METHOD,申请号KR20117029862-传众专利搜索

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发明名称	LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, AND DEVICE FABRICATING METHOD
摘要
申请公布号	KR20120076696(A)	申请公布日期	2012.07.09
申请号	KR20117029862	申请日期	2010.05.14
申请人	NIKON CORPORATION	发明人	NAGASAKA HIROYUKI
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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