发明名称 |
EXPOSURE METHOD AND EXPOSURE DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure method and an exposure device. <P>SOLUTION: An exposure device in the invention that performs exposure by exposing an object substance with predetermined thickness to light includes: a light source for emitting light to the object substance; a support medium for supporting the object substance; an optical filter that is placed between the light source and the support medium and is provided with multiple filter areas which selectively filter each specific wavelength band included in the light; and transfer means for transferring the optical filter. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012128413(A) |
申请公布日期 |
2012.07.05 |
申请号 |
JP20110258019 |
申请日期 |
2011.11.25 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO LTD |
发明人 |
YI CHANG-BO;CUI ZHEHAO;MOK JEE-SOO |
分类号 |
G03F7/20;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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