| 摘要 |
Treating workpieces in a vacuum treatment system, comprises applying a negative bias to the workpieces, and avoiding a damage to the workpieces because of voltage breakdowns in the vacuum treatment device during the treatment process, such that if the current, which flows through the workpieces to be treated from the previously measured average current deviates around more than one value maximum permissible deviation (delta I) positive, interrupts the treatment process. The value delta I is coupled to the negative bias such that it rises monotonically with the amount of the bias voltage. An independent claim is also included for a vacuum treatment system for treating workpieces under vacuum, comprising an evacuated vacuum chamber, a substrate carrier to place the workpiece to be treated, a bias generator for applying a negative bias to the workpieces to be treated, means for detecting the current flowing through the workpieces to be treated, means for averaging the detected current through the workpieces, means for determining the deviation of the actual current through the workpieces from the averaged current and comparing with an automatically adjustable maximum permissible deviation (delta I). |
