TREATMENT APPARATUS FOR DISCHARGING FLUID

摘要

PURPOSE: An exhaust fluid treating apparatus is provided to improve the treating efficiency of operational byproducts and to improve the stability of operational processes by including a plasma reactor at the front side of a vacuum pump. CONSTITUTION: An exhaust fluid treating apparatus includes a vacuum pump(100) and a plasma reactor(200). The vacuum pump is in connection with an operational chamber and generates vacuum in the operational chamber. Fluid generated from the operational chamber is exhausted by the vacuum pump. The plasma reactor decomposes the fluid from the operational chamber. The plasma reactor includes an insulating pipe, one or more electrode parts, and buffer parts. The pipe is arranged between the operational chamber and the vacuum pump and secures the decomposition space of the fluid. The electrode parts are arranged at the outer circumference of the pipe. The buffer parts are based on electric conductive elastomer and are interposed between the pipe and the electrode parts.