| 摘要 |
PURPOSE: An apparatus and method for processing a liquid, and a recording medium for performing a program thereof are provided to reducing process time by preventing treatment solution from remaining on a substrate. CONSTITUTION: A substrate holding unit(40) holds a substrate. A treatment solution supply unit(70) supplies treatment solution to the substrate held by the substrate holding unit. A rinsing liquid supply unit(80) supplies rising liquid to the substrate. A light emitting element(112) emits light to a surface of the substrate. A control unit(200) controls the substrate holding unit, the treatment solution apply unit, the rinsing liquid supply unit and the light emitting unit. |
