ELECTROMAGNETIC CASTING METHOD OF SILICON INGOT

摘要

PURPOSE: An electromagnetic casting method of a silicon ingot is provided to improve humidity removing performance of replacement processing. CONSTITUTION: The atmosphere in a chamber is replaced with inert gas atmosphere before the casting of a silicon ingot. The replacing process is as follows. The chamber is formed into vacuum state(S1). After the vacuum forming state, inert gas atmosphere is inserted in the chamber in set pressure(S3). The pressure in the chamber is recovered and maintained in determined pressure(S4).