| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce power consumption and/or improve performance characteristics of a sensor in order to help increase of sensitivity and/or a dynamic range regarding the sensor with a sensor bridge which is supported on a substrate. <P>SOLUTION: Many openings (34, 36, 38, 40, 42, 44) to be thermally isolated are provided to a sensor bridge, and a sensor bridge (32) is thermally isolated from a substrate (20). A heating element (26), an upstream sensor element (22), and/or a downstream sensor element (24) are provided on the sensor bridge (32). A plurality of openings (34, 36, 38, 40, 42, 44) extend by passing through the sensor bridge (32), the heating element (26), the upstream and the downstream sensor elements (22, 24) are thermally isolated from the substrate (20) and/or from each other. The plurality of openings (34, 36, 38, 40, 42, 44) are substantially made into the round shape, the oval shape, the rectangular shape, and/or other suitable shapes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
